5/20/2010	9:34:26 AM	Bypass valve closed
5/20/2010	9:34:27 AM	Main Vac valve closed
5/20/2010	9:34:32 AM	Program exited cleanly
5/20/2010	9:48:10 AM	Program started normally
5/20/2010	9:48:10 AM	Helium valve closed
5/20/2010	9:48:10 AM	H2 valve closed
5/20/2010	9:48:10 AM	BCl3 valve closed
5/20/2010	9:48:10 AM	PH3 valve closed
5/20/2010	9:48:10 AM	SiCl4 pre valve closed
5/20/2010	9:48:10 AM	SiCl4 post valve closed
5/20/2010	9:48:10 AM	Main Vac valve closed
5/20/2010	9:48:10 AM	Bypass valve closed
5/20/2010	9:48:10 AM	Bubbler valve closed
5/20/2010	9:48:10 AM	Helium MFC set to  0.000000
5/20/2010	9:48:10 AM	H2 MFC set to  0.000000
5/20/2010	9:48:10 AM	BCl3 MFC set to  0.000000
5/20/2010	9:48:10 AM	SiCl4 MFC set to  0.000000
5/20/2010	9:48:10 AM	Bypass solenoid MFC set to  760.000000
5/20/2010	9:48:10 AM	Tube furnace set to 0
5/20/2010	9:48:13 AM	Bypass valve opened
5/20/2010	9:48:15 AM	Bypass valve closed
5/20/2010	9:48:18 AM	Program exited cleanly
5/20/2010	10:38:02 AM	Program started normally
5/20/2010	10:38:02 AM	Helium valve closed
5/20/2010	10:38:02 AM	H2 valve closed
5/20/2010	10:38:02 AM	BCl3 valve closed
5/20/2010	10:38:02 AM	PH3 valve closed
5/20/2010	10:38:02 AM	SiCl4 pre valve closed
5/20/2010	10:38:02 AM	SiCl4 post valve closed
5/20/2010	10:38:02 AM	Main Vac valve closed
5/20/2010	10:38:02 AM	Bypass valve closed
5/20/2010	10:38:02 AM	Bubbler valve closed
5/20/2010	10:38:02 AM	Helium MFC set to  0.000000
5/20/2010	10:38:02 AM	H2 MFC set to  0.000000
5/20/2010	10:38:02 AM	BCl3 MFC set to  0.000000
5/20/2010	10:38:02 AM	SiCl4 MFC set to  0.000000
5/20/2010	10:38:02 AM	Bypass solenoid MFC set to  760.000000
5/20/2010	10:38:03 AM	Tube furnace set to 0
5/20/2010	10:38:46 AM	Program exited cleanly
5/20/2010	3:55:54 PM	Program started normally
5/20/2010	3:55:55 PM	Helium valve closed
5/20/2010	3:55:55 PM	H2 valve closed
5/20/2010	3:55:55 PM	BCl3 valve closed
5/20/2010	3:55:55 PM	PH3 valve closed
5/20/2010	3:55:55 PM	SiCl4 pre valve closed
5/20/2010	3:55:55 PM	SiCl4 post valve closed
5/20/2010	3:55:55 PM	Main Vac valve closed
5/20/2010	3:55:55 PM	Bypass valve closed
5/20/2010	3:55:55 PM	Bubbler valve closed
5/20/2010	3:55:55 PM	Helium MFC set to  0.000000
5/20/2010	3:55:55 PM	H2 MFC set to  0.000000
5/20/2010	3:55:55 PM	BCl3 MFC set to  0.000000
5/20/2010	3:55:55 PM	SiCl4 MFC set to  0.000000
5/20/2010	3:55:55 PM	Bypass solenoid MFC set to  760.000000
5/20/2010	3:55:55 PM	Tube furnace set to 0
5/20/2010	3:55:57 PM	Bypass valve opened
5/20/2010	3:55:58 PM	Main Vac valve opened
5/20/2010	3:56:49 PM	Bypass valve closed
5/20/2010	3:56:50 PM	Main Vac valve closed
5/20/2010	3:56:51 PM	Bypass valve opened
5/20/2010	3:56:52 PM	Main Vac valve opened
5/20/2010	4:45:56 PM	Program started after a nonstandard shutdown
5/20/2010	4:45:56 PM	Helium valve closed
5/20/2010	4:45:56 PM	H2 valve closed
5/20/2010	4:45:57 PM	BCl3 valve closed
5/20/2010	4:45:57 PM	PH3 valve closed
5/20/2010	4:45:57 PM	SiCl4 pre valve closed
5/20/2010	4:45:57 PM	SiCl4 post valve closed
5/20/2010	4:45:57 PM	Main Vac valve closed
5/20/2010	4:45:57 PM	Bypass valve closed
5/20/2010	4:45:57 PM	Bubbler valve closed
5/20/2010	4:45:57 PM	Helium MFC set to  0.000000
5/20/2010	4:45:57 PM	H2 MFC set to  0.000000
5/20/2010	4:45:57 PM	BCl3 MFC set to  0.000000
5/20/2010	4:45:57 PM	SiCl4 MFC set to  0.000000
5/20/2010	4:45:57 PM	Bypass solenoid MFC set to  760.000000
5/20/2010	4:45:57 PM	Tube furnace set to 0
5/20/2010	4:45:58 PM	Bypass valve opened
5/20/2010	4:45:59 PM	Main Vac valve opened
